Direct Nanoimprinting of Si Single Crystals Using SiC Molds for Ordered Anodic Tunnel Etching
Version of Record online: 3 MAY 2005
Copyright © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 17, Issue 10, pages 1293–1295, May, 2005
How to Cite
Nishio, K., Yasui, K., Matsumoto, F., Kanezawa, K. and Masuda, H. (2005), Direct Nanoimprinting of Si Single Crystals Using SiC Molds for Ordered Anodic Tunnel Etching. Adv. Mater., 17: 1293–1295. doi: 10.1002/adma.200401879
- Issue online: 3 MAY 2005
- Version of Record online: 3 MAY 2005
- Manuscript Accepted: 10 JAN 2005
- Manuscript Received: 16 NOV 2004
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