Patterned MoS2 Nanostructures Over Centimeter-Square Areas


  • This research was supported by an NSF CAREER Award (CHE-0349302). This work made use of the NUANCE Center facilities, which are supported by NSF-MRSEC, NSF-NSEC, Keck Foundation and Northwestern University. Supporting Information is available online from Wiley InterScience or from the author.


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A simple fabrication route combining large-area nanoscale-patterning methods with gaseous sulfidation is used to generate well-ordered, highly crystalline arrays of MoS2 nanostructures. Independent control over the dimensions of the patterned nanostructures can be achieved. Preferential orientation of MoS2 nanocrystals relative to the surface is observed (see Figure) depending on the position of the patterned substrates within the tube furnace.