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Keywords:

  • Lithography, nano-;
  • Microcontact printing;
  • Nanoparticles;
  • Patterning, chemical;
  • Patterning, surface;
  • Self-assembled monolayers
Thumbnail image of graphical abstract

Patterning of nanoparticles on surfaces (see Figure) is accomplished by a combination of nanoimprint lithography, self-assembly, and vertical deposition. Substrates patterned by a combination of topographical and chemical templates produce lines with a maximum resolution of 60 nm, compared with 300 nm for substrates patterned only chemically. Hexagonally close-packed 50 nm clusters are obtained by using substrates patterned with circles rather than lines.