Multiscale Nanopatterns Templated from Two-Dimensional Assemblies of Photoresist Particles

Authors

  • J. H. Moon,

    1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, 373–1 Guseong-dong, Yuseong-gu, Daejeon, 305–701, Korea
    2. Present address: Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, PA 19104, USA.
    Search for more papers by this author
  • S. G. Jang,

    1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, 373–1 Guseong-dong, Yuseong-gu, Daejeon, 305–701, Korea
    Search for more papers by this author
  • J.-M. Lim,

    1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, 373–1 Guseong-dong, Yuseong-gu, Daejeon, 305–701, Korea
    Search for more papers by this author
  • S.-M. Yang

    1. Department of Chemical and Biomolecular Engineering, Korea Advanced Institute of Science and Technology, 373–1 Guseong-dong, Yuseong-gu, Daejeon, 305–701, Korea
    Search for more papers by this author

  • This work was supported by the National R&D Project for Nano Science and Technology of the Ministry of Commerce, Industry and Energy. Partial support was received from the Center for Nanoscale Mechatronics and Manufacturing through the 21st Century Frontier Research Program (M102 KN010002–05 K1401–00214). The BK21 and CUPS-ERC programs are also acknowledged. We thank Dr. Won Sun Kim and Dr. Jong-Wook Ha for useful discussions.

Abstract

original image

Multiscale nanopatterns fabricated by colloidal lithography, using two-dimensional self-assemblies of photoresist particles as masks, are presented. The colloidal masks with features of multiple length scales are obtained by photolithography and used for constructing submicrometer-hole arrays over large areas (see Figure). By depositing functional materials through these masks, nanopatterned substrates useful in a wide range of applications can be produced.

Ancillary