High-κ Dielectric Nanofilms Fabricated from Titania Nanosheets

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Abstract

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2D titania nanosheets are attractive candidates as insulating materials for high-κ dielectrics. Solution-based layer-by-layer deposition combined with an atomically flat SrRuO3 electrode produces atomically uniform multilayer nanofilms. These nanofilms exhibit high relative dielectric constants (ϵr) of approximately 125, even for thicknesses down to 10 nm, in contrast to size- induced degradation typical in high-κ materials (see figure).

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