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Keywords:

  • Ferromagnetic materials;
  • Lithography, electron beam;
  • Magnetic materials;
  • Nanopatterning;
  • Perovskites
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Regular arrays of magnetic perovskite dots less than 100 nm in diameter (see Figure) are made by a process incorporating pulsed laser deposition, patterning with electron-beam lithography, and exposure to neutralized 200 eV Ar ions. The nanodots preserve the magnetic properties of large-area magnetic perovskite films, and are the smallest structures made of these materials to date.