Localized Functionalization of Single Nanopores


  • We thank the staff of the Microlaboratory of the University of California Berkeley, especially Jimmy Chang and Xiaofan Meng, for the assistance they provided with the equipment. We are also grateful to the staff of the National Center for Electron Microscopy at Lawrence Berkeley National Laboratory, especially Andrew Minor, for valuable help with the FIB. This work was performed under the auspices of the U.S. Department of Energy by University of California Lawrence Livermore National Laboratory under contract W-7405-Eng-48. It was funded by a Laboratory Directed Research and Development grant (LDRD-ER # 03-ERD-013).


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Chemical functionality is localized at the entrance of single nanopores using the controlled growth of an oxide ring. Nanopores fabricated by focused-ion-beam machining on silicon platforms (see Figure and Cover) are locally functionalized by ion-beam-assisted oxide deposition followed by immobilization of DNA probes via silane chemistry. Ion-current measurements are used to demonstrate nanopore functionalization.