Trilayered Ceramic–Metal–Polymer Microcantilevers with Dramatically Enhanced Thermal Sensitivity


  • We acknowledge H. Ko and K. Anderson for sample preparation and Dr. L. Zhang (Agiltron) for technical discussions. Support is provided by AFOSR.F49620-03-C-0069 Grant via Agiltron, Inc.


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Trilayered ceramic–metal–polymer thermally sensitive microcantilevers with the topmost polymer nanocomposite layers reinforced with carbon nanotubes and metal nanoparticles are described (see figure and inside cover). These trilayered microcantilevers show dramatically enhanced thermal sensitivity and could be used in next-generation uncooled IR sensor arrays with thermal and spatial resolution many times higher than currently available sensors.