Three-Dimensional Optical Lithography for Photonic Microstructures


  • This work was supported by the UK Engineering and Physical Sciences Research Council and by the EC-funded Network of Excellence PHOREMOST (FP6/2003/IST/2-511616). O. M. R. acknowledges the support of the Scatcherd Science Foundation.


original image

Photonic-crystal devices must be precisely aligned within a photonic- crystal lattice. Rapid and flexible optical fabrication of a device embedded in, and in registration with, a 3D photonic crystal is demonstrated. Holographic lithography (see figure) is used to define the underlying periodic microstructure in a single exposure, and two-photon laser writing to create localized structural defects. An intermediate latent image of the photonic crystal is used to align the two exposures.