We thank Dr. Seunghwan Lee from Surface Science and Technology at ETH Zürich for AFM analysis, financial support from the European network of excellence GOSPEL “General Olfaction and Sensing Project on a European Level” under contract number IST-507610, and from the Swiss Bundesamt für Energie under the project OneBat—Start and Kommission für Technik und Innovation OneBat Discovery Project are gratefully acknowledged. We would like to thank the IMT-Comlab technical staff for their help in the processing of the devices.
Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis†
Article first published online: 14 NOV 2006
Copyright © 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 18, Issue 22, pages 3015–3018, November, 2006
How to Cite
Beckel, D., Briand, D., Studart, A. R., de Rooij, N. F. and Gauckler, L. J. (2006), Topography Mediated Patterning of Inorganic Materials by Spray Pyrolysis. Adv. Mater., 18: 3015–3018. doi: 10.1002/adma.200600718
- Issue published online: 14 NOV 2006
- Article first published online: 14 NOV 2006
- Manuscript Revised: 31 MAY 2006
- Manuscript Received: 4 APR 2006
- European network of excellence GOSPEL “General Olfaction and Sensing Project on a European Level”. Grant Number: IST-507610
- OneBat—Start and Kommission für Technik und Innovation OneBat Discovery Project
- Surface patterning;
- Thin films
Microstructured ceramic thin films are produced by spray pyrolysis of metal salt solutions onto micromachined substrates. The ceramic structures built on the substrate result from preferential assembly of particles on the edge of the initially micromachined structures, leading to smaller lateral dimensions (1–2 μm in width) than the initial structures on the substrate (see figure). The assembly process amplifies the height of the initial structures by a factor of approximately thirty, resulting in features with an aspect ratio of three.