Advanced Materials

Hollow Inorganic Nanospheres and Nanotubes with Tunable Wall Thicknesses by Atomic Layer Deposition on Self-Assembled Polymeric Templates

Authors

  • R. H. A. Ras,

    1. Laboratory of Optics and Molecular Materials, Department of Engineering Physics and Mathematics and Center for New Materials, Helsinki University of Technology, P.O. Box 2200, 02015 TKK, Espoo, Finland
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  • M. Kemell,

    1. Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki, P.O. Box 55, 00014 Helsinki, Finland
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  • J. de Wit,

    1. Laboratory of Polymer Chemistry, Materials Science Centre, University of Groningen, Nijenborgh 4, 9747 AG, Groningen, The Netherlands
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  • M. Ritala,

    1. Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki, P.O. Box 55, 00014 Helsinki, Finland
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  • G. ten Brinke,

    1. Laboratory of Polymer Chemistry, Materials Science Centre, University of Groningen, Nijenborgh 4, 9747 AG, Groningen, The Netherlands
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  • M. Leskelä,

    1. Laboratory of Inorganic Chemistry, Department of Chemistry, University of Helsinki, P.O. Box 55, 00014 Helsinki, Finland
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  • O. Ikkala

    1. Laboratory of Optics and Molecular Materials, Department of Engineering Physics and Mathematics and Center for New Materials, Helsinki University of Technology, P.O. Box 2200, 02015 TKK, Espoo, Finland
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  • The authors would like to thank Riikka Puurunen (VTT) for inspiring discussions. This work was supported as part of the European Science Foundation Collaborative Research (EUROCORES) Programme on Self-Organised NanoStructures (SONS), Academy of Finland (201564), and carried out in part within the Centre of Excellence of Academy of Finland (“Bio- and Nanopolymers Research Group”, 77317).

Abstract

The construction of inorganic nanostructures with hollow interiors is demonstrated by coating self-assembled polymeric nano-objects with a thin Al2O3 layer by atomic layer deposition (ALD), followed by removal of the polymer template upon heating. The morphology of the nano-object (i.e., spherical or cylindrical) is controlled by the block lengths of the copolymer. The thickness of the Al2O3 wall is controlled by the number of ALD cycles.

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