It is a great pleasure to acknowledge many wonderful students, postdoctoral fellows, and colleagues who have contributed to the work described in this article. This review is dedicated to all of them. Special thanks to Dr. Peng-Fei Fu at Dow Corning Corporation (USA) for the recent collaborations on the development of new materials for nanoimprint technology. This work was supported by NSF grants ECS-0424204 and ECS-0508252, AFOSR grant FA9550-04-1-0312, and NSFC grant No. 60528003.
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Review
Nanoimprint Lithography: Methods and Material Requirements†
Article first published online: 25 JAN 2007
DOI: 10.1002/adma.200600882
Copyright © 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Additional Information
How to Cite
Guo, L. J. (2007), Nanoimprint Lithography: Methods and Material Requirements. Adv. Mater., 19: 495–513. doi: 10.1002/adma.200600882
- †
Publication History
- Issue published online: 9 FEB 2007
- Article first published online: 25 JAN 2007
- Manuscript Revised: 8 AUG 2006
- Manuscript Received: 24 APR 2006
Funded by
- NSF. Grant Numbers: ECS-0424204, ECS-0508252
- AFOSR. Grant Number: FA9550-04-1-0312
- NSFC. Grant Number: 60528003
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