Advanced Materials

(Fe,Mn)3O4 Nanochannels Fabricated by AFM Local-Oxidation Nanolithography using Mo/Poly(methyl methacrylate) Nanomasks

Authors


  • The authors acknowledge D. Marré, I. Pallecchi, M. Rolandi, I. Satoh, A. S. Siri, A. Takagi, and T. Yanagida for useful discussions. This work was partially supported by the Ministry of Education, Science, Sports and Culture through a Grant-in-Aid for Scientific Research (B) and in Priority Areas No. 769.

Abstract

Epitaxial (Fe,Mn)3O4thin films are patterned into nanochannels using molybdenum/poly(methyl methacrylate) (PMMA) nanomasks realized by combining local anodic oxidation of Mo and dry etching of PMMA. Nanostructures on the 100 nm scale can be easily fabricated by subsequent wet chemical etching with H3PO4 (see figure). (Fe,Mn)3O4 nanochannels open the possibility of fabricating spin-polarized nanocircuits for room-temperature spintronics.

original image

Ancillary