High-Modulus Spin-On Organosilicate Glasses for Nanoporous Applications


  • This official contribution of the National Institute of Standards and Technology is not subject to copyright in the United States of America. This work was supported in part by the System IC 2010 Project of Korea, the Chemistry and Molecular Engineering Program of the Brain Korea 21 Project, and the NIST Office of Microelectronics Programs. The authors thank Dr. Robert Cook and Jack Douglas for their careful critique of the manuscript. Supporting Information is available online from Wiley InterScience or from the author.


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Both the modulus and hardness of a conventional methylsilsesquioxane-type organosilicate, typically synthesized from the methyltrimethoxysilane monomer, can be substantially improved by incorporating organic bridging units through additions of the bis(triethoxysilyl)ethane monomer. The microstructural basis for these enhanced properties is described in this Communication.