Communication

High-Modulus Spin-On Organosilicate Glasses for Nanoporous Applications†

  1. H. W. Ro1,2,
  2. K. Char3,
  3. E.-c. Jeon4,
  4. H.-J. Kim2,
  5. D. Kwon4,
  6. H.-J. Lee1,
  7. J.-K. Lee2,
  8. H.-W. Rhee5,
  9. C. L. Soles1,
  10. D. Y. Yoon2

Article first published online: 1 FEB 2007

DOI: 10.1002/adma.200601528

Issue

Advanced Materials

Advanced Materials

Volume 19, Issue 5, pages 705–710, March, 2007

Additional Information

How to Cite

Ro, H. W., Char, K., Jeon, E.-c., Kim, H.-J., Kwon, D., Lee, H.-J., Lee, J.-K., Rhee, H.-W., Soles, C. L. and Yoon, D. Y. (2007), High-Modulus Spin-On Organosilicate Glasses for Nanoporous Applications. Adv. Mater., 19: 705–710. doi: 10.1002/adma.200601528

Author Information

  1. 1

    Polymers Division, National Institute of Standards & Technology, Gaithersburg, MD 20899, USA

  2. 2

    Department of Chemistry, Seoul National University, Seoul 151-747, Korea

  3. 3

    School of Chemical & Biological Engineering, Seoul National University, Seoul 151-742, Korea

  4. 4

    School of Materials Science & Engineering, Seoul National University, Seoul 151-747, Korea

  5. 5

    Department of Chemical Engineering, Sogang University, Seoul 121-742, Korea

  1. †

    This official contribution of the National Institute of Standards and Technology is not subject to copyright in the United States of America. This work was supported in part by the System IC 2010 Project of Korea, the Chemistry and Molecular Engineering Program of the Brain Korea 21 Project, and the NIST Office of Microelectronics Programs. The authors thank Dr. Robert Cook and Jack Douglas for their careful critique of the manuscript. Supporting Information is available online from Wiley InterScience or from the author.

Publication History

  1. Issue published online: 27 FEB 2007
  2. Article first published online: 1 FEB 2007
  3. Manuscript Revised: 25 SEP 2006
  4. Manuscript Received: 7 JUL 2006

Funded by

  • System IC 2010 Project of Korea
  • Chemistry and Molecular Engineering Program of the Brain Korea 21 Project
  • NIST Office of Microelectronics Programs

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