Monodomain High-Aspect-Ratio 2D and 3D Ordered Porous Alumina Structures with Independently Controlled Pore Spacing and Diameter


  • This research was supported by Microelectronics Advanced Research Corporation, National Science Foundation, and Singapore-MIT Alliance and was enabled through use of the fabrications facilities of Nanostructures Laboratory at MIT. We thank Dr. Kornelius Nielsch of MPI-Halle, and Henry I. Smith and Caroline Ross of the Massachusetts Institute of Technology for helpful discussions.


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Ordered porous alumina with uniform as well as nanofunnel-shaped pore structures are fabricated by using interference lithography to template pore formation and to control the pore spacing, and by using electrolyte changes to independently control and vary the diameters of the pores.