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Keywords:

  • Lasing;
  • Nanopatterning;
  • Photoresponsive materials;
  • Sol–gels;
  • Titanium oxides
Thumbnail image of graphical abstract

Direct 3D patterning of TiO2 with femtosecond laser pulses using a sol–gel-based negative-tone spin-coatable TiO2 resist is demonstrated (see figure). A layer of the resist was spun on glass and patterned in three dimensions by exposing it to femtosecond laser pulses and then developing in acetone. Heat treatment at 400 °C in air gave 3D patterns that were ca. 50 % of their original size.