The work presented in this paper has been funded by the German Research Association (DFG) within the SPP1113.
Direct 3D Patterning of TiO2 Using Femtosecond Laser Pulses†
Article first published online: 13 APR 2007
Copyright © 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 19, Issue 9, pages 1218–1221, May, 2007
How to Cite
Passinger, S., Saifullah, M. S. M., Reinhardt, C., Subramanian, K. R. V., Chichkov, B. N. and Welland, M. E. (2007), Direct 3D Patterning of TiO2 Using Femtosecond Laser Pulses. Adv. Mater., 19: 1218–1221. doi: 10.1002/adma.200602264
- Issue published online: 27 APR 2007
- Article first published online: 13 APR 2007
- Manuscript Revised: 27 NOV 2006
- Manuscript Received: 4 OCT 2006
- German Research Association (DFG). Grant Number: SPP1113
- Photoresponsive materials;
- Titanium oxides
Direct 3D patterning of TiO2 with femtosecond laser pulses using a sol–gel-based negative-tone spin-coatable TiO2 resist is demonstrated (see figure). A layer of the resist was spun on glass and patterned in three dimensions by exposing it to femtosecond laser pulses and then developing in acetone. Heat treatment at 400 °C in air gave 3D patterns that were ca. 50 % of their original size.