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Polymer-Based Photonic Crystals Fabricated with Single-Step Electron-Beam Lithography


  • We would like to thank Y. C. Tsai for fruitful discussions about the 3D PC band gap. This work is supported by the National Science Council No. NSC 95-2112-M-001-062-MY3. The fabrication work was performed at the Core-facility Center, Academia Sinica.


A suspended PMMA quasi-3D PC slab with a hexagonal array of air holes fabricated by using a single-step electron-beam lithography process is shown in the figure (PMMA = polymethylmethacrylate). The extension of the single-step lithography technique to the fabrication of 3D multilayer nanostructures with photonic band gaps in the visible-light region is demonstrated.

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