Communication

Photopatternable Imaging Layers for Controlling Block Copolymer Microdomain Orientation†

  1. E. Han1,
  2. I. In1,3,
  3. S.-M. Park2,
  4. Y.-H. La2,
  5. Y. Wang1,
  6. P. F. Nealey2,
  7. P. Gopalan1

Article first published online: 21 NOV 2007

DOI: 10.1002/adma.200602708

Issue

Advanced Materials

Advanced Materials

Volume 19, Issue 24, pages 4448–4452, December, 2007

Additional Information

How to Cite

Han, E., In, I., Park, S.-M., La, Y.-H., Wang, Y., Nealey, P. F. and Gopalan, P. (2007), Photopatternable Imaging Layers for Controlling Block Copolymer Microdomain Orientation. Adv. Mater., 19: 4448–4452. doi: 10.1002/adma.200602708

Author Information

  1. 1

    Department of Materials Science and Engineering, University of Wisconsin, Madison, WI 53706 (USA)

  2. 2

    Department of Chemical and Biological Engineering, University of Wisconsin, Madison, WI 53706 (USA)

  3. 3

    Current address: Department of Polymer Science and Engineering, Chungju National University Chungju, Chungbuk, 380-702, Korea

  1. †

    This work was supported by the Semiconductor Research Corporation, the UW-NSF Nanoscale Science and Engineering Center (DMR-0425880), and the center on Functional Engineered Nano Architectonics (FENA).

Publication History

  1. Issue published online: 11 DEC 2007
  2. Article first published online: 21 NOV 2007
  3. Manuscript Revised: 19 APR 2007
  4. Manuscript Received: 27 NOV 2006

Funded by

  • Semiconductor Research Corporation
  • UW-NSF Nanoscale Science and Engineering Center. Grant Number: DMR-0425880
  • Functional Engineered Nano Architectonics (FENA)

SEARCH

SEARCH BY CITATION

ARTICLE TOOLS

Get PDF (414K)

Keywords:

  • Block copolymers;
  • Lithography;
  • Semiconductors;
  • Thin films
Thumbnail image of graphical abstract

An ultrathin photo-crosslinkable random copolymer film was designed as a substrate-independent imaging layer for block copolymer (BCP) thin films. Negative-tone resist chemistry was combined with the chemistry of neutral surfaces to formulate the imaging layer. The synthesis of the imaging layer, optimization of the photo-crosslinking conditions, and patterning of BCP thin films on the imaging layer is discussed. The mild room temperature crosslinking chemistry is especially attractive for BCPs containing temperature-sensitive monomers.

Get PDF (414K)