Optical and Structural Properties of Single Phase Epitaxial p-Type Transparent Oxide Thin Films


  • This work was supported by the Laboratory Directed Research and Development Project at Los Alamos National Laboratory under the U.S. Department of Energy (DOE) and by the DOE Solid State Lighting Program managed by DOE EE-RE.


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Single phase, epitaxial, transparent, and p-type CuAlO2films are successfully grown on c-plane sapphire by polymer-assisted deposition. At wavelengths in the range of 400–1000 nm, the optical transmittance of the films is 60–80 %. The energy band gap is 3.6 eV. The as-synthesized CuAlO2 films are highly resistive, with room-temperature resistivity around 105 Ω cm. The resistivity can be reduced to 103–104 Ω cm by post-annealing films in oxygen.