Micropumps Based on the Enhanced Electroosmotic Effect of Aluminum Oxide Membranes

Authors

  • J.-Y. Miao,

    1. Department of Physics and the Institute of Nano Science and Technology, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong (China)
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  • Z.-L. Xu,

    1. Department of Physics and the Institute of Nano Science and Technology, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong (China)
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  • X.-Y. Zhang,

    1. Department of Physics and the Institute of Nano Science and Technology, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong (China)
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  • N. Wang,

    1. Department of Physics and the Institute of Nano Science and Technology, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong (China)
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  • Z-Y. Yang,

    1. Department of Physics and the Institute of Nano Science and Technology, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong (China)
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  • P. Sheng

    1. Department of Physics and the Institute of Nano Science and Technology, The Hong Kong University of Science and Technology, Clear Water Bay, Kowloon, Hong Kong (China)
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  • This work was financially supported by the Hong Kong Research Grants Council (Project Nos. 603905 and CA04/05.SC02).

Abstract

original image

We have successfully decorated Micro-/nanochannel surfaces of annealed anodic aluminum oxide (AAO) membranes are decorated to greatly enhance their electroosmotic effect as well as the structural stability. The micro/nanopumps made from annealed AAO membranes with thin silica coating on the inner surfaces of the nanochannels exhibited a large dynamic range of pumping rates, low operating voltages and high maximum flow rates.

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