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Keywords:

  • ceramics;
  • CVD;
  • mechanical properties;
  • silicon nitride
Thumbnail image of graphical abstract

Silicon nitride with helical structure was prepared on a large scale by CVD. On the microscale, these coiled Si3N4 ceramics still possess superelasticity and can recover their original shapes after cyclic loadings without noticeable deformations. These results suggest helical microcoils could have potential in microdevices for MEMS, motors, electromagnets, generators, and related equipment.