The work was supported by the Natural Science Foundation of China and the Research Foundation for the Doctoral Program of Higher Education of China.
Superelastic and Spring Properties of Si3N4 Microcoils†
Article first published online: 11 APR 2008
Copyright © 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 20, Issue 9, pages 1738–1743, May 5, 2008
How to Cite
Cao, C., Du, H., Xu, Y., Zhu, H., Zhang, T. and Yang, R. (2008), Superelastic and Spring Properties of Si3N4 Microcoils. Adv. Mater., 20: 1738–1743. doi: 10.1002/adma.200701021
- Issue published online: 5 MAY 2008
- Article first published online: 11 APR 2008
- Manuscript Revised: 27 OCT 2007
- Manuscript Received: 30 APR 2007
- mechanical properties;
- silicon nitride
Silicon nitride with helical structure was prepared on a large scale by CVD. On the microscale, these coiled Si3N4 ceramics still possess superelasticity and can recover their original shapes after cyclic loadings without noticeable deformations. These results suggest helical microcoils could have potential in microdevices for MEMS, motors, electromagnets, generators, and related equipment.