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Superelastic and Spring Properties of Si3N4 Microcoils


  • The work was supported by the Natural Science Foundation of China and the Research Foundation for the Doctoral Program of Higher Education of China.


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Silicon nitride with helical structure was prepared on a large scale by CVD. On the microscale, these coiled Si3N4 ceramics still possess superelasticity and can recover their original shapes after cyclic loadings without noticeable deformations. These results suggest helical microcoils could have potential in microdevices for MEMS, motors, electromagnets, generators, and related equipment.

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