This research was supported by the U.S. Army through the Institute for Soldier Nanotechnologies, under Contract DAAD-19-02D-0002 with the U.S. Army Research Office. The authors thank Dr. Sreeram Vaddiraju for valuable comments. The authors thank Kevin Kyungbum Ryu for photolithography. This work made use of MIT's shared scanning-electron-beam-lithography facility in the Research Laboratory of Electronics.
Grafted Conducting Polymer Films for Nano-patterning onto Various Organic and Inorganic Substrates by Oxidative Chemical Vapor Deposition†
Article first published online: 11 SEP 2007
Copyright © 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 19, Issue 19, pages 2863–2867, October, 2007
How to Cite
Im, S. G., Yoo, P. J., Hammond, P. T. and Gleason, K. K. (2007), Grafted Conducting Polymer Films for Nano-patterning onto Various Organic and Inorganic Substrates by Oxidative Chemical Vapor Deposition. Adv. Mater., 19: 2863–2867. doi: 10.1002/adma.200701170
- Issue published online: 1 OCT 2007
- Article first published online: 11 SEP 2007
- Manuscript Revised: 10 JUL 2007
- Manuscript Received: 15 MAY 2007
- U.S. Army through the Institute for Soldier Nanotechnologies. Grant Number: DAAD-19-02D-0002
- U.S. Army Research Office
- Chemical vapor deposition;
- Conducting polymers;
Conductive polymer chains were directly grafted on a variety of organic substrates containing aromatic functionalities. In this one-step mechanism, the covalent linkages between the substrates and the conducting polymers are created. The enhanced adhesion by grafting enables high-resolution patterning (down to 60 nm) of grafted PEDOT films using standard lithographic techniques without any modification of the patterning processes.