Integrated Direct DNA/Protein Patterning and Microfabrication by Focused Ion Beam Milling

Authors

  • Jie Jiang,

    1. Department of Chemical & Biomolecular Engineering, National University of Singapore National University of Singapore, 4 Engineering Drive 4, Singapore117576 (Singapore)
    Search for more papers by this author
  • Xiaomin Li,

    1. WinTech Nano-Technology Services Pte. Ltd. 10 Science Park Road, Singapore Science Park II, Singapore 117684 (Singapore)
    Search for more papers by this author
  • Wing Cheung Mak,

    1. Division of Bioengineering, National University of Singapore National University of Singapore, 7 Engineering Drive 1, Singapore 117574 (Singapore)
    Search for more papers by this author
  • Dieter Trau

    Corresponding author
    1. Division of Bioengineering, National University of Singapore National University of Singapore, 7 Engineering Drive 1, Singapore 117574 (Singapore)
    • Division of Bioengineering, National University of Singapore National University of Singapore, 7 Engineering Drive 1, Singapore 117574 (Singapore).
    Search for more papers by this author

  • This work was financially supported by Research Grant POD0412401 from the Defense Science and Technology Agency (DSTA) of Singapore. We thank Prof. Jim Yang Lee for providing the gold evaporator and Chee Hsiang Leong for experimental support. Supporting information is available online from Wiley InterScience or from the author.

Abstract

original image

Single and binary component patterning and integrated microfabrication of biomolecules, such as DNA and proteins, can be achieved by focused ion-beam (FIB) biolithography. Well-defined micropatterns are obtained by FIB milling on biomolecules immobilized on SiO2 wafers and protected by a thin Au film. The retention of biofunctionality is excellent (68–90%) and a feature size of down to 500 nm can be achieved for the patterns without significant loss of functionality.

Ancillary