We thank Dr. A. Aerts for scientific discussions on nitrogen adsorption. C.E.A.K. and J.A.M. acknowledge the Flemish government for a concerted research action (GOA).
Evidence of Large Voids in Pure-Silica-Zeolite Low-k Dielectrics Synthesized by Spin-on of Nanoparticle Suspensions†
Article first published online: 16 JUN 2008
Copyright © 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 20, Issue 16, pages 3110–3116, August 18, 2008
How to Cite
Eslava, S., Baklanov, M. R., Neimark, A. V., Iacopi, F., Kirschhock, C. E. A., Maex, K. and Martens, J. A. (2008), Evidence of Large Voids in Pure-Silica-Zeolite Low-k Dielectrics Synthesized by Spin-on of Nanoparticle Suspensions. Adv. Mater., 20: 3110–3116. doi: 10.1002/adma.200701798
- Issue published online: 14 AUG 2008
- Article first published online: 16 JUN 2008
- Manuscript Revised: 20 DEC 2007
- Manuscript Received: 23 JUL 2007
- porous materials;
Spin-on pure-silica-zeolite or Silicalite films are currently considered as outstanding low-k materials because of their stiffness and ultralow dielectric constant. It is shown that spin-on Silicalite films with low k values unavoidably contain cavities tens of nanometers wide, representing a considerable challenge in their application as on-chip interconnects.