Micropatterning Layers by Flame Aerosol Deposition-Annealing


  • Financial support was provided by Nanoprim and KTI #7745.1. The authors would like to thank Dr. F. Krumeich (EMEZ ETH Zurich) for microscopic analyses.


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A flame process for in situ synthesis and micropatterned deposition of highly porous, self-assembled, lace-like nanostructured layers of pure or Pt-doped SnO2 is presented. These layers are stabilized in situ by rapid flame annealing that results in transparent cauliflower-like layers with strong adhesion to substrates containing integrated circuitry, while exhibiting high CO sensitivity (f).