This research has been financially supported by the Dutch Science Foundation, SenterNovem.
Research News
3-D Integrated All-Solid-State Rechargeable Batteries†
Article first published online: 21 NOV 2007
DOI: 10.1002/adma.200702398
Copyright © 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Additional Information
How to Cite
Notten, P., Roozeboom, F., Niessen, R. and Baggetto, L. (2007), 3-D Integrated All-Solid-State Rechargeable Batteries. Advanced Materials, 19: 4564–4567. doi: 10.1002/adma.200702398
- †
Publication History
- Issue published online: 11 DEC 2007
- Article first published online: 21 NOV 2007
Funded by
- Dutch Science Foundation, SenterNovem
- Abstract
- References
- Cited By
Keywords:
- Batteries, lithium-ion;
- Biomedical applications;
- Intercalation;
- Portable energy sources;
- Wireless devices
Graphical Abstract

Rechargeable all-solid-state batteries prevent electrode degradation upon cycling and electrolyte leakage. Based on the excellent intercalation chemistry in Si thin films, a new 3D-integrated all-solid-state battery concept is proposed (see figure). High-aspect-ratio cavities and features, etched in silicon, will yield large surface area batteries with anticipated energy density of about 5 mWh μm–1 cm–2, i.e. more than 3 orders of magnitude higher than that of integrated capacitors.
Abstract
Portable society urgently calls for integrated energy supplies. This holds for autonomous devices but even more so for future medical implants. Evidently, rechargeable integrated all-solid-state batteries will play a key role in these fields, enabling miniaturization, preventing electrode degradation upon cycling and electrolyte leakage. Planar solid-state thin film batteries are rapidly emerging but reveal several potential drawbacks, such as a relatively low energy density and the use of highly reactive lithium. Thin film Si-intercalation electrodes covered with a solid-state electrolyte are found to combine a high storage capacity of 3500 mAh g–1 with high cycle life, enabling to integrate batteries in Si. Based on the excellent intercalation chemistry of Si, a new 3D-integrated all-solid-state battery concept is proposed. High aspect ratio cavities and features, etched in silicon, will yield large surface area batteries with anticipated energy density of about 5 mWh μm–1 cm–2, i.e. more than 3 orders of magnitude higher than that of integrated capacitors.

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