High-Speed Roll-to-Roll Nanoimprint Lithography on Flexible Plastic Substrates


  • This research is supported by NSF (grant No. CMII 0700718), AFOSR (grant No. F064-006-0084), and the University of Michigan Technology Transfer Office (GAP fund). We thank Dr. Jin-Sung Kim for providing the short-period Si mold used in this study.


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Nanograting structures in either thermally or UV curable resist are continuously fabricated on a flexible plastic substrate by a high-speed roll-to-roll nanoimprint apparatus (see figure). As an example of the applications of such a roll-to-roll imprinting process, a high-performance metal wire-grid polarizer is demonstrated.