Patterned Growth and Transfer of ZnO Micro and Nanocrystals with Size and Location Control


  • We acknowledge support of this work by NSF DMI-0556161 and NSF DMI-0621137. We also acknowledge NSF MRSEC Awards DMR-0212302, ECS-0229087, ECS-0407613 for early seed support.


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A method to fabricate and transfer crystalline ZnO with control over location, orientation, size, and shape is reported. The process uses an oxygen plasma treatment in combination with a photoresist pattern on magnesium-doped GaN substrates to define narrow nucleation regions and attachment points with 100 nanometer scale dimensions. Lateral epitaxial overgrowth follows nucleation to produce single-crystalline ZnO shown in the figure.