SEARCH

SEARCH BY CITATION

Keywords:

  • Coatings;
  • Doping;
  • Erbium;
  • Luminescence;
  • Nanocrystals, inorganic;
  • Patterning;
  • Silica;
  • Silicon

Abstract

Patterned nanostructure arrays of luminescent, oxide-embedded silicon nanocrystals (nc-Si) are formed by reductively thermally processing e-beam patterns of hydrogen silsesquioxane (HSQ). While traditionally employed as a negative type e-beam resist, HSQ is shown to produce thin films, non-flat conformal coatings, and sub-10 nm structures that contain luminescent nc-Si. The variety of morphologies (structures) that can be produced by this method highlights the versatility of HSQ as a nc-Si precursor, report Jonathan Veinot and co-workers from the University of Alberta, Canada on p. 3513.