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Communication

Fabrication of Ultrathin Single-Crystal Diamond Membranes†

  1. Barbara A. Fairchild1,*,
  2. Paolo Olivero1,5,
  3. Sergey Rubanov1,
  4. Andrew D. Greentree1,
  5. Felix Waldermann2,
  6. Robert A. Taylor2,
  7. Ian Walmsley2,
  8. Jason M. Smith3,
  9. Shane Huntington4,
  10. Brant C. Gibson4,
  11. David N. Jamieson1,
  12. Steven Prawer1

Article first published online: 15 OCT 2008

DOI: 10.1002/adma.200801460

Issue

Advanced Materials

Advanced Materials

Volume 20, Issue 24, pages 4793–4798, December 17, 2008

Additional Information

How to Cite

Fairchild, B. A., Olivero, P., Rubanov, S., Greentree, A. D., Waldermann, F., Taylor, R. A., Walmsley, I., Smith, J. M., Huntington, S., Gibson, B. C., Jamieson, D. N. and Prawer, S. (2008), Fabrication of Ultrathin Single-Crystal Diamond Membranes. Adv. Mater., 20: 4793–4798. doi: 10.1002/adma.200801460

Author Information

  1. 1

    School of Physics, University of Melbourne VIC 3010 (Australia)

  2. 2

    Clarendon Laboratory, University of Oxford Oxford, OX1 3PU (UK)

  3. 3

    Department of Materials, University of Oxford Oxford, OX1 3PH (UK)

  4. 4

    Quantum Communications Victoria, School of Physics University of Melbourne VIC 3010 (Australia)

  5. 5

    Present address: Department of Experimental Physics, University of Torino, Torino 10126, Italy

*School of Physics, University of Melbourne VIC 3010 (Australia).

  1. †

    This work was supported by the Australian Research Council; the International Science Linkages program established under the Australian Government's innovation statement, Backing Australia's Ability; the Engineering and Physical Sciences Research Council UK (EP/F024525); and the Army Research Office (ARO) under contract no. W911NF-04-1-0290. A. D. G is the recipient of an Australian Research Council Queen Elizabeth II Fellowship (project number DP0880466). Quantum Communications Victoria acknowledges support from the Victorian Government's Science, Technology, and Innovation Infrastructure Grants Program.

Publication History

  1. Issue published online: 16 DEC 2008
  2. Article first published online: 15 OCT 2008
  3. Manuscript Revised: 20 AUG 2008
  4. Manuscript Received: 28 MAY 2008

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Keywords:

  • diamond;
  • membranes;
  • nano-electromechanical systems;
  • nanostructure;
  • photonics
Thumbnail image of graphical abstract

Sub-micrometer layers of single-crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double-implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210 nm thick.

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