This work was supported by the Australian Research Council; the International Science Linkages program established under the Australian Government's innovation statement, Backing Australia's Ability; the Engineering and Physical Sciences Research Council UK (EP/F024525); and the Army Research Office (ARO) under contract no. W911NF-04-1-0290. A. D. G is the recipient of an Australian Research Council Queen Elizabeth II Fellowship (project number DP0880466). Quantum Communications Victoria acknowledges support from the Victorian Government's Science, Technology, and Innovation Infrastructure Grants Program.
Fabrication of Ultrathin Single-Crystal Diamond Membranes†
Article first published online: 15 OCT 2008
Copyright © 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 20, Issue 24, pages 4793–4798, December 17, 2008
How to Cite
Fairchild, B. A., Olivero, P., Rubanov, S., Greentree, A. D., Waldermann, F., Taylor, R. A., Walmsley, I., Smith, J. M., Huntington, S., Gibson, B. C., Jamieson, D. N. and Prawer, S. (2008), Fabrication of Ultrathin Single-Crystal Diamond Membranes. Adv. Mater., 20: 4793–4798. doi: 10.1002/adma.200801460
- Issue published online: 16 DEC 2008
- Article first published online: 15 OCT 2008
- Manuscript Revised: 20 AUG 2008
- Manuscript Received: 28 MAY 2008
- nano-electromechanical systems;
Sub-micrometer layers of single-crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double-implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210 nm thick.