Advanced Materials

Fabrication of Ultrathin Single-Crystal Diamond Membranes

Authors


  • This work was supported by the Australian Research Council; the International Science Linkages program established under the Australian Government's innovation statement, Backing Australia's Ability; the Engineering and Physical Sciences Research Council UK (EP/F024525); and the Army Research Office (ARO) under contract no. W911NF-04-1-0290. A. D. G is the recipient of an Australian Research Council Queen Elizabeth II Fellowship (project number DP0880466). Quantum Communications Victoria acknowledges support from the Victorian Government's Science, Technology, and Innovation Infrastructure Grants Program.

Abstract

Sub-micrometer layers of single-crystal diamond suitable for subsequent processing are fabricated. The method employed is a significant enabling technology for nanomechanical and photonic structures incorporating color centers. The process uses a novel double-implant process, annealing, and chemical etching to produce membranes. The thinnest layers achieved to date are 210 nm thick.

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