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Advanced Materials

Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering

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Abstract

A high-temperature piezoelectric material exhibits a good balance between high maximum use temperature and large piezoelectricity. This is achieved by the combination of the discovery of a phase transition in scandium aluminum nitride (ScxAl1 − xN) alloy thin films, and the use of dual cosputtering, which leads to nonequilibrium alloy thin films.

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