Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering
Article first published online: 2 DEC 2008
Copyright © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 21, Issue 5, pages 593–596, February 2, 2009
How to Cite
Akiyama, M., Kamohara, T., Kano, K., Teshigahara, A., Takeuchi, Y. and Kawahara, N. (2009), Enhancement of Piezoelectric Response in Scandium Aluminum Nitride Alloy Thin Films Prepared by Dual Reactive Cosputtering. Adv. Mater., 21: 593–596. doi: 10.1002/adma.200802611
- Issue published online: 22 JAN 2009
- Article first published online: 2 DEC 2008
- Manuscript Revised: 2 OCT 2008
- Manuscript Received: 3 SEP 2008
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