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Thermochemical Patterning of Polymer Thin Films With Tunable Size-Reduction Effects Using Metal-Coated Poly(dimethylsiloxane) Stamps

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Metal-coated poly(dimethylsiloxane) (PDMS) stamps are treated as parallel microelectrodes to selectively induce thermochemical crosslinking of polymer thin films on Si substrates. Periodical polymer micro- and nanostructures with various size-reduction effects can be achieved by changing the conditions during metal deposition or modifying the surface of the metal-coated PDMS stamp.

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