Optoelectrothermic Control of Highly Integrated Polymer-Based MEMS Applied in an Artificial Skin



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A large-scale integration technology for MEMS based on the optoelectrothermic control of a temperature-sensitive hydrogel is described and exemplified using an imaging array system, a so-called artificial skin. The hydrogel itself acts as active functional unit, i.e., as actuator. The artificial skin comprises more than 4 000 individual actuators and provides both, visual and palpable artificial impressions of a surface.