Towards Entire-Carbon-Nanotube Circuits: The Fabrication of Single-Walled-Carbon-Nanotube Field-Effect Transistors with Local Multiwalled-Carbon-Nanotube Interconnects

Authors

  • Xuelei Liang,

    Corresponding author
    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
    • Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China).
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  • Sheng Wang,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Xianlong Wei,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Li Ding,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Yuzhen Zhu,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Zhiyong Zhang,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Qing Chen,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
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  • Yan Li,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices and College of Chemistry and Molecular Engineering, Peking University Beijing 100871 (PR China)
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  • Jin Zhang,

    1. Key Laboratory for the Physics and Chemistry of Nanodevices and College of Chemistry and Molecular Engineering, Peking University Beijing 100871 (PR China)
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  • Lian-Mao Peng

    Corresponding author
    1. Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China)
    • Key Laboratory for the Physics and Chemistry of Nanodevices, and Department of Electronics, Peking University Beijing 100871 (PR China).
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Abstract

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Single-walled-carbon-nanotube field-effect transistors with multiwalled carbon nanotubes as local interconnects have been fabricated and integrated into a complementary metal oxide-semiconductor inverter. This device prototype sheds light on future integrated circuits made entirely of carbon nanotubes.

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