Wafer-Level Patterned and Aligned Polymer Nanowire/Micro- and Nanotube Arrays on any Substrate

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Abstract

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A novel technique for fabrication of patterned and aligned polymer-nanowire/micro-and nanotube (PNW/PNT) arrays on a wafer-level substrate of any material is reported. By creating a designed pattern on a spin-coated polymer film using techniques, such as stamping or micro-tip writing, plasma etching results in the formation of aligned PNW arrays distributed according to the pattern.

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