Morphology Control of Nanotube Arrays

Authors

  • Zhifeng Huang,

    Corresponding author
    1. Department of Electrical and Computer Engineering University of Alberta, AB, T6G 2V4 (Canada).
    • Department of Electrical and Computer Engineering University of Alberta, AB, T6G 2V4 (Canada).
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  • Kenneth D. Harris,

    1. National Research Council Canada National Institute for Nanotechnology 11421 Saskatchewan Drive, Edmonton, AB, T6G 2M9 (Canada)
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  • Michael J. Brett

    Corresponding author
    1. Department of Electrical and Computer Engineering University of Alberta, AB, T6G 2V4 (Canada).
    2. National Research Council Canada National Institute for Nanotechnology 11421 Saskatchewan Drive, Edmonton, AB, T6G 2M9 (Canada)
    • Department of Electrical and Computer Engineering University of Alberta, AB, T6G 2V4 (Canada).
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Abstract

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Arrays of silicon nanotubes (SiNTs) with controllable architectures, wall thicknesses and crystallinity are fabricated by a new template-assisted technique. The method includes a sequence of glancing angle deposition of the templates, low-pressure CVD shell-Si coating, ion-milling to expose the templates, and wet-chemical etching for template removal. The technique may be generally adapted to a wide variety of morphologies and NT materials.

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