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Contact-Printed Microelectromechanical Systems

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Abstract

A process for rapid fabrication of metallic MEMS (microelectromechanical systems) without lithographic processing is presented. Using dimensionally scalable contact printing, 3D electromechanical structures (see figure) are fabricated and functionally tested. Flexible, paper-thin device arrays produced by this method may enable such applications as pressure sensing skins for people and vehicles, phased array detectors for acoustic imaging, and novel adaptive-texture display applications.

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