Solvent-assisted decal transfer lithography (DTL) enables the formation of well-defined micro-/nanostructures over a large area (∼4 in. wafer) by combining irreversible oxygen bonding and anisotropic swelling of poly(dimethoxylsiloxane) (PDMS). Such swelling-induced stress gradient allows for cohesion failure of the skin layer upon removal of the stamp, leaving behind a highly uniform layer (∼100 nm).
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