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Directed Self-Assembly of Block Copolymers on Two-Dimensional Chemical Patterns Fabricated by Electro-Oxidation Nanolithography

Authors

  • Ji Xu,

    1. Department of Polymer Science and Engineering University of Massachusetts Amherst 120 Governors Drive, Amherst MA 01003 (USA)
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  • Soojin Park,

    1. School of Energy Engineering Ulsan National Institute of Science and Technology 100 Banyeon-ri, Eonyang-eup, Ulju-gun, Ulsan (Korea)
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  • Shiliu Wang,

    1. Deerfield Academy Deerfield, MA 01342 (USA)
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  • Thomas P. Russell,

    Corresponding author
    1. Department of Polymer Science and Engineering University of Massachusetts Amherst 120 Governors Drive, Amherst MA 01003 (USA)
    • Department of Polymer Science and Engineering University of Massachusetts Amherst 120 Governors Drive, Amherst MA 01003 (USA).
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  • Benjamin M. Ocko,

    Corresponding author
    1. Condensed Matter Physics and Materials Science Department Brookhaven National Laboratory Upton, NY 11973 (USA)
    • Condensed Matter Physics and Materials Science Department Brookhaven National Laboratory Upton, NY 11973 (USA).
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  • Antonio Checco

    Corresponding author
    1. Condensed Matter Physics and Materials Science Department Brookhaven National Laboratory Upton, NY 11973 (USA)
    • Condensed Matter Physics and Materials Science Department Brookhaven National Laboratory Upton, NY 11973 (USA).
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Abstract

A hexagonal web of carboxylic-terminated nanostripes (left image, bright areas) is patterned onto a methyl-terminated surface of an octadecyltrichlorosilane monolayer. A thermally annealed polystyrene-block-poly(ethylene oxide) (PS-b-PEO) thin-film, spin-cast on the chemical pattern (right image), exhibits surface normal oriented cylindrical PEO microdomains on the methyl-terminated regions only. These chemical patterns effectively template the order and spatial orientation of diblock-copolymer microdomains.

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