Optically Selective Microlens Photomasks Using Self-Assembled Smectic Liquid Crystal Defect Arrays

Authors

  • Yun Ho Kim,

    1. Department of Chemical and Biomolecular Eng. (BK-21) Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea)
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  • Jeong-Oen Lee,

    1. School of Electrical Engineering and Computer Science Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea)
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  • Hyeon Su Jeong,

    1. Department of Chemical and Biomolecular Eng. (BK-21) Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea)
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  • Jung Hyun Kim,

    1. Department of Chemical and Biomolecular Eng. (BK-21) Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea)
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  • Eun Kyung Yoon,

    1. Department of Chemical and Biomolecular Eng. (BK-21) Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea)
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  • Dong Ki Yoon,

    1. Department of Chemical and Biomolecular Eng. (BK-21) Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea)
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  • Jun-Bo Yoon,

    1. School of Electrical Engineering and Computer Science Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea)
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  • Hee-Tae Jung

    Corresponding author
    1. Department of Chemical and Biomolecular Eng. (BK-21) Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea)
    • Department of Chemical and Biomolecular Eng. (BK-21) Korea Advanced Institute of Science and Technology Daejeon 305-701 (Korea).
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Abstract

original image

A photomask that combines two imaging elements (microlens arrays and clear windows) in one structure has been developed by using toric focal conic domain (TFCD) micro arrays of smectic liquid crystals. Their application as optically selective photomasks by simply adjusting (i) the illumination dose, (ii) the size of TFCD array mask, and (iii) the tone of photoresist (PR) is demonstrated (see figure).

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