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Surface Functionalization of Epoxy-Resist- Based Microcantilevers with Iron Oxide Nanocrystals



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A functionalization procedure is integrated in the fabrication of micromechanical SU-8 cantilevers in order to chemically bind organic-capped Fe2O3 NCs at the photoresist surface, under visible light, ambient atmosphere and room temperature. The achieved highly interconnected NC multilayer network is demonstrated an active layer for real-time detection of acetone vapor molecules.