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Communication
Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Article first published online: 8 JUN 2010
DOI: 10.1002/adma.200904153
Copyright © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
1521-4095/asset/cover.gif?v=1&s=1ecdf0f9272c171896989510a5367f6c79d94702 "Advanced Materials")
Additional Information
How to Cite
Burckel, D. B., Wendt, J. R., Ten Eyck, G. A., Ellis, A. R., Brener, I. and Sinclair, M. B. (2010), Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography. Adv. Mater., 22: 3171–3175. doi: 10.1002/adma.200904153
Publication History
- Issue published online: 3 AUG 2010
- Article first published online: 8 JUN 2010
- Manuscript Received: 3 DEC 2009
Funded by
- United Stated Department of Energy’s National Nuclear Security Administration. Grant Number: DE-AC04-94AL85000
- Abstract
- Article
- References
- Cited By
Keywords:
- Metamaterials;
- Photonics;
- Photonic Crystals;
- Composite Materials
A new fabrication approach, self-aligned membrane projection lithography, is used to create composite split ring resonators with a resonance near 10 μm. The composite resonators are oriented on the interior face of approximately-spheroidal cavities, and hence represent the first instance of fabrication of micrometer-scale SRRs with out-of-plane current flow.