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Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography



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A new fabrication approach, self-aligned membrane projection lithography, is used to create composite split ring resonators with a resonance near 10 μm. The composite resonators are oriented on the interior face of approximately-spheroidal cavities, and hence represent the first instance of fabrication of micrometer-scale SRRs with out-of-plane current flow.