Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography
Article first published online: 8 JUN 2010
Copyright © 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Volume 22, Issue 29, pages 3171–3175, August 3, 2010
How to Cite
Burckel, D. B., Wendt, J. R., Ten Eyck, G. A., Ellis, A. R., Brener, I. and Sinclair, M. B. (2010), Fabrication of 3D Metamaterial Resonators Using Self-Aligned Membrane Projection Lithography. Adv. Mater., 22: 3171–3175. doi: 10.1002/adma.200904153
- Issue published online: 3 AUG 2010
- Article first published online: 8 JUN 2010
- Manuscript Received: 3 DEC 2009
- United Stated Department of Energy’s National Nuclear Security Administration. Grant Number: DE-AC04-94AL85000
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