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Keywords:

  • Nanolithography;
  • Scanning probe techniques;
  • Surface patterning;
  • Nanopatterning
Thumbnail image of graphical abstract

3D patterning by means of probe-assisted thermal decomposition has been achieved on phthalaldehyde polymer films with 1 nm vertical resolution and 40 nm lateral resolution. Highly efficient patterning is enabled by a self-amplified depolymerization mechanism. Pixel writing speeds on the order of microseconds are demonstrated.