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Keywords:

  • direct laser writing;
  • light-emitting diodes;
  • nanoLEDs;
  • semiconductors

Graphical Abstract

Thumbnail image of graphical abstract

Nanoscale light-emitting diodes (nanoLEDs) and arrays of nanoLEDs produced by laser controlled diffusion of interstitial manganese (Mni) donor ions out of the ferromagnetic semiconductor (GaMn)As towards the underlying layers of a quantum well heterostructure. The approach represents an alternative to deep etching for the creation of nanoscale current channels and nanoLEDs.